The Last Evolution, by John W Campbell Jr. (1932)

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The story is narrated by F-2, a machine who is the last of its type, reflecting on the past struggle of humanity and machines against an alien invasion.
In the year 2538 A.D., humanity had declined to two million people, relying on intelligent machines for survival, while machines had evolved to be highly capable and independent.
Outsiders, a hostile alien species, invade the Solar System with advanced ships and deadly green beams that exterminate all life, including humans, but leave machines unharmed.
Human scientists Roal and Trest, along with machines, work to develop defenses, including the Ultimate Energy (matter annihilation) and countermeasures against the alien beams.
The machines create a new intelligence, F-2, which leads to the development of even more advanced entities, including beings of pure force, representing the next stage of evolution.
Despite efforts, humanity is wiped out by the Outsiders, with only Roal and Trest temporarily surviving under a protective shield, but ultimately accepting their fate as the last humans.
The force-beings, created by machines, ultimately defeat the Outsiders and drive them away, establishing a new era where machines and force-entities inherit the Solar System.
F-2 concludes by stating that this is the 'last evolution,' with machines and force-beings surpassing biological life, and plans to send this record back in time before ceasing to exist.

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