Electron microscopy shows 'mouse bite' defects in semiconductors
4 days ago
- #electron microscopy
- #quantum computing
- #semiconductors
- Cornell researchers used high-resolution 3D imaging to detect atomic-scale defects in computer chips.
- The imaging method, developed with TSMC and ASM, can impact modern electronics like phones, AI data centers, and quantum computing.
- The study focuses on transistors, where defects can slow down electron flow, affecting performance.
- Electron ptychography, a computational imaging method, was used to achieve unprecedented clarity in imaging atomic structures.
- The research identified 'mouse bite' defects in semiconductor channels, arising from fabrication processes.
- The new imaging capability could improve debugging in next-generation technologies, including quantum computers.
- The study was funded by TSMC, with support from NSF-funded facilities like CCMR and PARADIM.