Chinese foundry SMIC achieves 5nm production without EUV tools
a day ago
- #SMIC
- #Huawei
- #semiconductors
- SMIC achieves volume production of 5 nm-class node (N+3) without EUV tools, using DUV lithography.
- Huawei Kirin 9030 SoC confirmed to be manufactured on SMIC N+3 node, advancing China's semiconductor independence.
- DUV limitations lead to yield challenges, with aggressive metal pitch scaling causing operational losses and die discards.
- SMIC likely uses multi-patterning techniques like SAQP to optimize DUV scanners for finer resolutions (~35 nm).
- SMIC tests domestically developed immersion DUV scanner (Shanghai Yuliangsheng) to reduce reliance on Western suppliers.
- Despite local efforts, SMIC N+3 node likely still relies on ASML tools for production.