China's CAS institute charts DUV route to 3nm GAA without EUV2 hours agotechnology milestonesemiconductorChinahttps://www.digitimes.com/news/a20260917PD204/china-3nm-duv-euv-gaa-development.htmlCopy Link中国先进半导体研究已达到新的里程碑。叶天春担任国家科技重大专项（02专项）首席技术工程师。